Initial results of new photomask-blank deposition tool

Michael D. Kriese; James R. Rodriguez; Yuriy Y. Platonov; James L. Wood

doi:10.1117/12.518314

17 December 2003 Initial results of new photomask-blank deposition tool

Michael D. Kriese, James R. Rodriguez, Yuriy Y. Platonov, James L. Wood

Proceedings Volume 5256, 23rd Annual BACUS Symposium on Photomask Technology; (2003) https://doi.org/10.1117/12.518314
Event: Photomask Technology, 2003, Monterey, California, United States

Abstract

In a joint-development, Rohwedder and Osmic have designed and built a low-defect dual-ion beam reactive-sputtering tool. The tool has been specifically targeted for developing low-defect lithography mask photoblank coatings intended as DUV absorbers and phase-shifting films. The Osmic/Rohwedder collaboration will continue into NGL - the present tool also serves as an R&D platform for EUVL mask blanks. The deposition tool and robotic substrate handler have been integrated and delivered to Osmic in the 2nd quarter of 2003. In this paper, we present initial capability for production of thin-film lithography coatings, including spectrophotometric performance, defect levels and film uniformity. Future reports will share results from more in-depth process development and optimization.

Citation Download Citation

Michael D. Kriese, James R. Rodriguez, Yuriy Y. Platonov, and James L. Wood "Initial results of new photomask-blank deposition tool", Proc. SPIE 5256, 23rd Annual BACUS Symposium on Photomask Technology, (17 December 2003); https://doi.org/10.1117/12.518314

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