Metrological properties of Moiré topography

Tomas Rossler; Miroslav Hrabovský

doi:10.1117/12.545124

21 November 2003 Metrological properties of Moire topography

Tomas Rossler, Miroslav Hrabovský

Proceedings Volume 5259, 13th Polish-Czech-Slovak Conference on Wave and Quantum Aspects of Contemporary Optics; (2003) https://doi.org/10.1117/12.545124
Event: 13th Polish-Czech-Slovak Conference on Wave and Quantum Aspects of contemporary Optics, 2002, Krzyzowa, Poland

Abstract

Topography is a method giving a contour map as result of measurement describing three-dimensional shape of measured objects. The paper is focused to projection moire topography. The measurement model is compiled at first of all. The parameters of topography (accuracy, sensitivity, resolution, range) are introduced by virtue of this model. They are the great tool for description of measurement from the point of view of its quality. Some examples of topography of object are introduced to illustrate the theoretical principles at the end.

Citation Download Citation

Tomas Rossler and Miroslav Hrabovský "Metrological properties of Moire topography", Proc. SPIE 5259, 13th Polish-Czech-Slovak Conference on Wave and Quantum Aspects of Contemporary Optics, (21 November 2003); https://doi.org/10.1117/12.545124

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