Volume holographic imaging for surface metrology with long working distances

Arnab Sinha; Wenyang Sun; Tina Shih; George Barbastathis

doi:10.1117/12.515715

26 February 2004 Volume holographic imaging for surface metrology with long working distances

Arnab Sinha, Wenyang Sun, Tina Shih, George Barbastathis

Proceedings Volume 5265, Two- and Three-Dimensional Vision Systems for Inspection, Control, and Metrology; (2004) https://doi.org/10.1117/12.515715
Event: Photonics Technologies for Robotics, Automation, and Manufacturing, 2003, Providence, RI, United States

Abstract

Volume holographic imaging (VHI) utilizes the Bragg selectivity of volume holograms to achieve 3D optical slicing. The depth resolution of VHI degrades quadratically with increasing object distance like most 3D imaging systems. We have devised an imaging scheme that takes advantage of the superior lateral resolution of VHI and a-priori surface information about the object to build a profilometer that can resolve 50 μm features at a working distance of ≈ 50 cm. We discuss the scheme and present experimental results of surface profiles of MEMS devices.

Citation Download Citation

Arnab Sinha, Wenyang Sun, Tina Shih, and George Barbastathis "Volume holographic imaging for surface metrology with long working distances", Proc. SPIE 5265, Two- and Three-Dimensional Vision Systems for Inspection, Control, and Metrology, (26 February 2004); https://doi.org/10.1117/12.515715

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