8 March 2004 Sensing arrays based on integrated optics microresonators for homeland security applications
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Proceedings Volume 5269, Chemical and Biological Point Sensors for Homeland Defense; (2004) https://doi.org/10.1117/12.515862
Event: Optical Technologies for Industrial, Environmental, and Biological Sensing, 2003, Providence, RI, United States
Abstract
Integrated optics micoresonators (μ-resonators) are microstructures with dimensions typically in the order of tens of microns down to a few microns, whose response depends critically on optical wavelength and material properties. Recent experimental studies have shown that they are suitable as refractive index sensors, absorption sensors, and microresonator-assisted single and two-photon fluorescence. The absorption and fluorescence spectra are material-specific properties, that the devices can readily detect by using different excitation wavelengths. Therefore, the devices are suitable for non-specific agent detection. Due to their inherent small size and the ease of cascading several microresonators, they are suitable building blocks for a sensing array allowing sensing/detection of multiple quantities/agents on a single chip, by e.g., using different chemo-optical transduction layers on top of the microresonators. Such devices have a chip-area of only a few 100 μm2, making them suitable for sensing ultra-small analyte volumes (which is advantageous for bio-chemical sensing). In this contribution, sensing arrays based on integrated optics microresonators and their prospects for Homeland Security applications are discussed. Several device-concepts based on integrated optics microresonators will be treated. Their performance is analyzed using realistic parameters and experimental results of microresonator devices realized in silicon oxynitride (SiON) technology. The potential integration of theses devices with microelectronics, micro-mechanics and micro total analysis systems is discussed.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Dion Klunder, Dion Klunder, Job Elders, Job Elders, Gert-Jan Burger, Gert-Jan Burger, Martin Amersfoort, Martin Amersfoort, Evgueni Krioukov, Evgueni Krioukov, Cees Otto, Cees Otto, Hugo Hoekstra, Hugo Hoekstra, Alfred Driessen, Alfred Driessen, } "Sensing arrays based on integrated optics microresonators for homeland security applications", Proc. SPIE 5269, Chemical and Biological Point Sensors for Homeland Defense, (8 March 2004); doi: 10.1117/12.515862; https://doi.org/10.1117/12.515862
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