Multilayer dielectric gratings for petawatt-class laser systems

Jerald A. Britten; William A. Molander; Aleksey M. Komashko; Christopher P.J. Barty

doi:10.1117/12.524015

10 June 2004 Multilayer dielectric gratings for petawatt-class laser systems

Jerald A. Britten, William A. Molander, Aleksey M. Komashko, Christopher P.J. Barty

Proceedings Volume 5273, Laser-Induced Damage in Optical Materials: 2003; (2004) https://doi.org/10.1117/12.524015
Event: XXXV Annual Symposium on Optical Materials for High Power Lasers: Boulder Damage Symposium, 2003, Boulder, Colorado, United States

Abstract

Existing Petawatt class lasers today based on Nd:glass architectures operating at nominally 500 J, 0.5 ps use meter-scale aperture, gold-overcoated master photoresist gratings to compress the amplified chirped pulse. Many lasers operating in the >1kJ, >1ps regime are in the planning stages around the world. These will require multilayer dielectric diffraction gratings to handle larger pulse energy than can be accommodated with gold gratings. Models of the electric field distribution in the solid material of these gratings suggest that high aspect-ratio structures used at high incidence angles will have better laser damage resistance. New tooling for transfer etching these submicron-grating patterns and for nondestructive critical-dimension measurement of these features on meter-scale substrates will be described.

Citation Download Citation

Jerald A. Britten, William A. Molander, Aleksey M. Komashko, and Christopher P.J. Barty "Multilayer dielectric gratings for petawatt-class laser systems", Proc. SPIE 5273, Laser-Induced Damage in Optical Materials: 2003, (10 June 2004); https://doi.org/10.1117/12.524015

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