30 March 2004 Comparison between conductometric and layered SAW hydrogen gas sensor
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Abstract
A comparison between the performance of conductometric and layered surface acoustic wave (SAW) hydrogen sensors is presented. Both sensor structures employ an R.F. magnetron sputtered tungsten trioxide (WO3) thin film as a selective layer for hydrogen (H2) sensing applications. The conductometric device is based on an alumina substrate, while the layered SAW device structure is fabricated on a 36° Y-cut, X-propagating LiTaO3 substrate with a zinc oxide (ZnO) guiding layer. The sensors were investigated for different operational temperatures and various concentrations of H2 in synthetic air.
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Samuel James Ippolito, Samuel James Ippolito, Sasikaran Kandasamy, Sasikaran Kandasamy, Kourosh Kalantar-zadeh, Kourosh Kalantar-zadeh, Wojtek Wlodarski, Wojtek Wlodarski, Anthony Holland, Anthony Holland, } "Comparison between conductometric and layered SAW hydrogen gas sensor", Proc. SPIE 5274, Microelectronics: Design, Technology, and Packaging, (30 March 2004); doi: 10.1117/12.522224; https://doi.org/10.1117/12.522224
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