Y2O3-based oxide phosphor thin film electroluminescent devices

Toshihiro Miyata; Yasuyuki Suzuki; Tadatsugu Minami

doi:10.1117/12.521582

30 March 2004 Y₂O₃-based oxide phosphor thin film electroluminescent devices

Toshihiro Miyata, Yasuyuki Suzuki, Tadatsugu Minami

Proceedings Volume 5274, Microelectronics: Design, Technology, and Packaging; (2004) https://doi.org/10.1117/12.521582
Event: Microelectronics, MEMS, and Nanotechnology, 2003, Perth, Australia

Abstract

This article introduces newly developed multicomponent oxide host materials for electroluminescent phosphors. These are composed of Y₂O₃ and another binary compound such as Al₂O₃, Ga₂O₃, Gd₂O₃, In₂O₃, B₂O₃ or GeO₂. The various Mn-activated (Y₂O₃)_1-x-(oxide)_x phosphor thin films were deposited while varying the composition by r.f. magnetron sputtering and postannealed. The obtained electroluminescent and photoluminescent emissions from the [(Y₂O₃)_1-x-(oxide)_x]:Mn phosphor thin-film emitting layers were strongly dependent on the preparation and postannealing conditions as well as on the composition. The highest luminance and photoluminescent intensity were obtained by using a (Y₂O₃)_1-x-(oxide)_x:Mn thin-film emitting layer prepared with an optimized composition. Both the obtained electroluminescent and photoluminescent characteristics were correlated to the crystallinity of the thin-film emitting layers. High luminances above 7000 cd/m² were obtained in [(Y₂O₃)_0.6-(GeO₂)_0.4]:Mn and [(Y₂O₃)_0.5-(Ga₂O₃)_0.5]:Mn thin-film electroluminescent devices fabricated under optimal condition and driven by an ac sinusoidal wave voltage at 1 kHz.

Citation Download Citation

Toshihiro Miyata, Yasuyuki Suzuki, and Tadatsugu Minami "Y₂O₃-based oxide phosphor thin film electroluminescent devices", Proc. SPIE 5274, Microelectronics: Design, Technology, and Packaging, (30 March 2004); https://doi.org/10.1117/12.521582

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