Application of imprint technologies for creation of micro- and nano-scale pattern

Thomas Glinsner; Michael Beutl; Steven Dwyer; Paul Lindner; Markus Wimplinger; Paul Kettner; Samy Hanna; Gunther Leising

doi:10.1117/12.522993

29 March 2004 Application of imprint technologies for creation of micro- and nanoscale pattern

Thomas Glinsner, Michael Beutl, Steven Dwyer, Paul Lindner, Markus Wimplinger, Paul Kettner, Samy Hanna, Gunther Leising

Author Affiliations +

Proceedings Volume 5275, BioMEMS and Nanotechnology; (2004) https://doi.org/10.1117/12.522993
Event: Microelectronics, MEMS, and Nanotechnology, 2003, Perth, Australia

Abstract

Nanoimprinting is a low cost method to fabricate features from μm down to the nm-range. Different nanofabrication techniques, namely hot embossing, UV-nanoimprinting as well as micro-contact printing will be discussed. Recently achieved results with nanoimprinting methods will be demonstrated.

Citation Download Citation

Thomas Glinsner, Michael Beutl, Steven Dwyer, Paul Lindner, Markus Wimplinger, Paul Kettner, Samy Hanna, and Gunther Leising "Application of imprint technologies for creation of micro- and nanoscale pattern", Proc. SPIE 5275, BioMEMS and Nanotechnology, (29 March 2004); https://doi.org/10.1117/12.522993

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available