Direct attachment of carbon nanotube on scanning probe tip using dielectrophoresis

Chang-Soo Han; Hyung-Woo Lee; Sung-Hun Ryu; Soo-Hyun Kim; Yoon-Keun Kwak

doi:10.1117/12.529801

29 March 2004 Direct attachment of carbon nanotube on scanning probe tip using dielectrophoresis

Chang-Soo Han, Hyung-Woo Lee, Sung-Hun Ryu, Soo-Hyun Kim, Yoon-Keun Kwak

Proceedings Volume 5275, BioMEMS and Nanotechnology; (2004) https://doi.org/10.1117/12.529801
Event: Microelectronics, MEMS, and Nanotechnology, 2003, Perth, Australia

Abstract

We found the simple, effective and low-cost fabrication method of scanning probe tip with carbon nanotube. The assembling apparatus has been discussed and a plausible explanation about attachment mechanism based on dielectrophoretic force has been suggested. In order to find the proper assembling condition, electric field analysis for the round shape tip has been accomplished. Using this condition, the scanning probe tips with carbon nanotube were fabricated at 25% success rate.

Citation Download Citation

Chang-Soo Han, Hyung-Woo Lee, Sung-Hun Ryu, Soo-Hyun Kim, and Yoon-Keun Kwak "Direct attachment of carbon nanotube on scanning probe tip using dielectrophoresis", Proc. SPIE 5275, BioMEMS and Nanotechnology, (29 March 2004); https://doi.org/10.1117/12.529801

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