High-aspect-ratio fabrications of micro journal air bearings for micro gas turbine engine

Xue Chuan Shan; Yoichi Murakoshi; Zhenfeng Wang; H. J. Lu; Yufeng Jin; Tsuyoshi Ikehara; Ryutaro  Maeda; C. K. Wong

doi:10.1117/12.522918

2 April 2004 High-aspect-ratio fabrications of micro journal air bearings for micro gas turbine engine

Xue Chuan Shan; Yoichi Murakoshi; Zhenfeng Wang; H. J. Lu; Yufeng Jin; Tsuyoshi Ikehara; Ryutaro Maeda; C. K. Wong

Author Affiliations +

Proceedings Volume 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III; (2004) https://doi.org/10.1117/12.522918
Event: Microelectronics, MEMS, and Nanotechnology, 2003, Perth, Australia

Abstract

In micro fabricated gas turbine engine, a micro journal air bearing is used to offer high speed and low wear operations. Fabrication of such a journal bearing is a critical challenge since the clearance of the bearing is only several micrometers with aspect ratio of more than 20. This paper reports on the fabrication of ultra-high aspect ratio micro journal air bearing using ICP DRIE (inductively coupled plasma deep reactive ion etching) process. The process parameters that resulted in bowed and tpaered journal bearing were investigated to improve the profile of the etched journal bearing. Micro journal bearings with sidewall verticality of almost 90° were obtained.

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Xue Chuan Shan, Xue Chuan Shan, Yoichi Murakoshi, Yoichi Murakoshi, Zhenfeng Wang, Zhenfeng Wang, H. J. Lu, H. J. Lu, Yufeng Jin, Yufeng Jin, Tsuyoshi Ikehara, Tsuyoshi Ikehara, Ryutaro Maeda, Ryutaro Maeda, C. K. Wong, C. K. Wong, } "High-aspect-ratio fabrications of micro journal air bearings for micro gas turbine engine", Proc. SPIE 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III, (2 April 2004); doi: 10.1117/12.522918; https://doi.org/10.1117/12.522918

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