25 March 2004 Bulk micromachined optical Fabry-Perot modulator
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Abstract
A new bulk micromachined Fabry-Perot modulator fabricated using (110) silicon is presented. The modulator has been developed to reduce the alignment and packaging restrictions imposed on surface micromachined Fabry-Perot modulators. The Fabry-Perot modulator consists of two vertical micromachined cantilever mirrors. The modulator is capable of a modulation depth of 7.8dB for modulation frequencies of up to 100kHz making it suitable for multiplexing low bandwidth sensors. Analytical results of the performance of the modulator compared to current microelectromechanical systems (MEMS) modulators are given and experimental results of the fabrication process indicate the practical realisation of the modulator. The design aspects of the modulator are analysed including the trade-off between bandwidth, beam length and drive voltage.
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Jason P. Chaffey, Mike Austin, Igor Switala, "Bulk micromachined optical Fabry-Perot modulator", Proc. SPIE 5277, Photonics: Design, Technology, and Packaging, (25 March 2004); doi: 10.1117/12.522028; https://doi.org/10.1117/12.522028
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