Novel MEMS torsional mirror optical switch

Yirong Yang; Wenping Liu; Yaming Wu; Jianyi Yang; Yuelin Wang

doi:10.1117/12.519925

7 May 2004 Novel MEMS torsional mirror optical switch

Yirong Yang, Wenping Liu, Yaming Wu, Jianyi Yang, Yuelin Wang

Proceedings Volume 5281, Optical Transmission, Switching, and Subsystems; (2004) https://doi.org/10.1117/12.519925
Event: Asia-Pacific Optical and Wireless Communications, 2003, Wuhan, China

Abstract

We have reported a novel 1x2 MEMS optical switch for telecommunication application. A vertical mirror was fabricated by wet anisotropic etching in (110)-oriented silicon wafer. Using DRIE (Deep Reactive Ion Etching) technique, we make a torsional actuator to turn a vertical mirror with a small angle. The actuator was composed of a cantilever beam and two electrodes with curved shape edges. The mirror size was 500 um (L) x 125 um (H) x 50 um (W), and the cantilever dimension was 3000 um (L) x 125 um (H) x 10 um (W). In the optical switch, ball lenses were added in the optics system to extend working distance of fibers. We also fabricated a micro optical platform integrated with the device to simplify the coupling. On the platform, a U-shape groove and fiber clamps were fabricated to accommodate and fix the SMF (single mode fiber). The surface roughness (Ra) of etched mirror was tested below 10 nm. The optical switch was tested on electric and optical characteristics: switching voltage 78.5V, resonance frequency 2.3 kHz, insertion loss 4 - 5 dB, crosstalk 45dB. The device can perform the switching function by the large.

Citation Download Citation

Yirong Yang, Wenping Liu, Yaming Wu, Jianyi Yang, and Yuelin Wang "Novel MEMS torsional mirror optical switch", Proc. SPIE 5281, Optical Transmission, Switching, and Subsystems, (7 May 2004); https://doi.org/10.1117/12.519925

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