7 May 2004 Study of torsion-beam actuator based on low applied voltage
Author Affiliations +
Proceedings Volume 5281, Optical Transmission, Switching, and Subsystems; (2004) https://doi.org/10.1117/12.519719
Event: Asia-Pacific Optical and Wireless Communications, 2003, Wuhan, China
Micromechanical optical switch has a good quality for free-space optical cross connects, particularly in terms of the low insertion loss, low crosstalk, low polarization dependent loss (PDL), wavelength-independence, and bit-rate transparency. In research of micromechanical optical switches, the electrostatic torsion beam actuator is widely used. But this actuator needs high-applied voltage. In this paper, the actuator with the slant counter electrode was proposed and fabricated with tilted 3° (111) silicon wafer.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Wei Dong, Wei Dong, Xin-Dong Zhang, Xin-Dong Zhang, Caixia Liu, Caixia Liu, Shuang Zhang, Shuang Zhang, Hui Tan, Hui Tan, Cuiping Jia, Cuiping Jia, Jianxuan Pan, Jianxuan Pan, Buwen Xiao, Buwen Xiao, Ping Ji, Ping Ji, Baokun Xu, Baokun Xu, Wei-You Chen, Wei-You Chen, } "Study of torsion-beam actuator based on low applied voltage", Proc. SPIE 5281, Optical Transmission, Switching, and Subsystems, (7 May 2004); doi: 10.1117/12.519719; https://doi.org/10.1117/12.519719

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