7 June 2004 Two-phase full-frame CCD with double ITO gate structure for increased sensitivity
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Abstract
In 1999 Kodak introduced the first two-phase, front-illuminated, full-frame CCD in which the electrodes corresponding to one phase were composed of Indium Tin Oxide (ITO), a material more transmissive than poly silicon. In an effort to further increase the sensitivity of front-illuminated image sensors, Kodak has developed an all-ITO electrode CCD. A 1280 x 1024 sensor with 16-mm pixels has been manufactured and characterized. The imaging performance of this device, including its sensitivity, dark current, and charge transfer efficiency, is described. The noise characteristics of the ITO-gated output amplifier MOSFET are also discussed.
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William Des Jardin, William Des Jardin, Steve Kosman, Steve Kosman, Neal Kurfiss, Neal Kurfiss, James Johnson, James Johnson, David Losee, David Losee, Gloria G. Putnam, Gloria G. Putnam, Anthony Tanbakuchi, Anthony Tanbakuchi, } "Two-phase full-frame CCD with double ITO gate structure for increased sensitivity", Proc. SPIE 5301, Sensors and Camera Systems for Scientific, Industrial, and Digital Photography Applications V, (7 June 2004); doi: 10.1117/12.530882; https://doi.org/10.1117/12.530882
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