16 April 2004 Chromatic confocal detection for high-speed microtopography measurements
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Abstract
The chromatic confocal approach enables the parallelization of the complete depth-scan of confocal topography measurements. Therefore, mechanical movement can be reduced or completely avoided and the measurement times shortened. Chromatic confocal point sensors are already commercially available but they need lateral scanning in x- and y-direction in order to measure surface topographies. We achieved a further parallelization in the x-direction by realizing a chromatic confocal line sensor using a line focus and a spectrometer. In a second setup, we realized an area measuring chromatic confocal microscope, which is capable of one-shot measurements without any mechanical scanning. The depth resolution of this setup can be improved by measuring in a small number of different heights. Additional information about the color distribution of the object is gained.
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Aiko K. Ruprecht, Klaus Koerner, Tobias F. Wiesendanger, Hans J. Tiziani, Wolfgang Osten, "Chromatic confocal detection for high-speed microtopography measurements", Proc. SPIE 5302, Three-Dimensional Image Capture and Applications VI, (16 April 2004); doi: 10.1117/12.525658; https://doi.org/10.1117/12.525658
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