15 July 2004 Evaporation and phase explosion during laser-induced forward transfer of aluminum
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Proceedings Volume 5339, Photon Processing in Microelectronics and Photonics III; (2004) https://doi.org/10.1117/12.537566
Event: Lasers and Applications in Science and Engineering, 2004, San Jose, Ca, United States
Abstract
Laser-Induced Forward Transfer (LIFT) of aluminum films was performed using a 7 ns Nd:YAG laser operating at 1064 nm. Aluminum films of 200 nm and 1 micron thickness were supported on glass substrates prior to transfer. Films were irradiated at the interface between the film and donor substrate using contact and non-contact configurations. Direct contact occurred between film and acceptor in contact mode, and non-contact mode used a gap of the order of tens of micrometers. Three transfer regimes were observed in contact mode- 1) single droplets or a ring-like structure with dimensions similar to or smaller than the laser spot size at low fluences, and 2) localized material transfer near the center of the laser spot above a threshold value of laser fluence, and 3) spattered material spreading outside of the laser spot. In non-contact mode at fluences below the contact mode spatter threshold, the transferred spot consisted of small droplets until reaching the spatter regime. The ring structure in contact mode is interpreted in terms of flow of molten aluminum resulting from Marangoni flow. The LIFT process observed in non-contact mode is interpreted in terms of evaporation at low fluences and phase explosion at high fluences.
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David A. Willis, Vicentiu Grosu, "Evaporation and phase explosion during laser-induced forward transfer of aluminum", Proc. SPIE 5339, Photon Processing in Microelectronics and Photonics III, (15 July 2004); doi: 10.1117/12.537566; https://doi.org/10.1117/12.537566
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