15 July 2004 Generation of uniformly spaced and nanosized structures by interfering femtosecond laser beams
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Proceedings Volume 5339, Photon Processing in Microelectronics and Photonics III; (2004) https://doi.org/10.1117/12.531639
Event: Lasers and Applications in Science and Engineering, 2004, San Jose, Ca, United States
Abstract
To correlate femtosecond laser beams in wide region and achieve laser ablation, beam correlators based on coherent optical system were developed. By processing thin films using the systems, uniformly spaced and nano-sized structures were generated. The generated structures were nanohole, grating, nanobump, bead on bump, standing bead. The shape of the structure changed on changing the laser fluence, the number of beams, and the correlation parameters. By peeling the structures, nano-sized materials such as nanomesh and nanobelt were generated.
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Yoshiki Nakata, Yoshiki Nakata, Tatsuo Okada, Tatsuo Okada, Mitsuo Maeda, Mitsuo Maeda, } "Generation of uniformly spaced and nanosized structures by interfering femtosecond laser beams", Proc. SPIE 5339, Photon Processing in Microelectronics and Photonics III, (15 July 2004); doi: 10.1117/12.531639; https://doi.org/10.1117/12.531639
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