Laser-assisted methods for nanofabrication

Andrei V. Kabashin; Michel Meunier

doi:10.1117/12.532281

15 July 2004 Laser-assisted methods for nanofabrication

Andrei V. Kabashin, Michel Meunier

Proceedings Volume 5339, Photon Processing in Microelectronics and Photonics III; (2004) https://doi.org/10.1117/12.532281
Event: Lasers and Applications in Science and Engineering, 2004, San Jose, Ca, United States

Abstract

An overview of laser-assisted nanofabrication methods, which has been developed in the Laser Processing Laboratory, is presented. All methods imply the laser-related ablation of material from a solid target and the production of nanoparticles or nanostructures. We consider the nanofabrication process in both the gaseous and in the liquid ambience under different parameters of laser radiation. A particular attention is given on the absence or presence of the plasma-related absorption of the laser radiation, which make possible different nanofabrication regimes. The methods lead to a production of nanomaterials, which are of importance for photonics and biosensing applications.

Citation Download Citation

Andrei V. Kabashin and Michel Meunier "Laser-assisted methods for nanofabrication", Proc. SPIE 5339, Photon Processing in Microelectronics and Photonics III, (15 July 2004); https://doi.org/10.1117/12.532281

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