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Effect of deposition parameters on the stress gradient of CVD and PECVD poly-SiGe for MEMS applications
Fabrication of an electrochemical tip-probe system embedded in SiNx cantilevers for simultaneous SECM and AFM analysis
Novel process for realization of multiple-axis actuators suitable for the realization of an optical switch
Fabrication of large-area x-rays masks for UDXRL on beryllium using thin film UV lithography and x-ray backside exposure