30 December 2003 Analysis of a process for replication of electroforming molds with integral microscreens
Author Affiliations +
Proceedings Volume 5342, Micromachining and Microfabrication Process Technology IX; (2003); doi: 10.1117/12.530761
Event: Micromachining and Microfabrication, 2004, San Jose, California, United States
Abstract
A process for the rapid replication of electroforming plastic micromolds has been developed at Sandia National Laboratories, Livermore, CA. The process is based on injection molding of plastic replicates with integral metallic screens to produce sacrificial electroforming molds in which the metallic screen acts as the conducting base and the plastic features provide insulating sidewalls. The process consists of injecting molten PMMA via a center-gate into a disk-shaped mold cavity in which a sandwich of a flow channel plate, porous Nickel foam, and metallic microscreen are placed on top of the LIGA-fabricated tooling. A numerical model for the coupled heat transfer and fluid flow phenomena is used to investigate the effects of various process parameters on the mold-filling behavior. The results from the parametric studies are presented and discussed.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Rangarajan Pitchumani, Qibo Jiang, Alfredo M. Morales, Linda A Domeier, "Analysis of a process for replication of electroforming molds with integral microscreens", Proc. SPIE 5342, Micromachining and Microfabrication Process Technology IX, (30 December 2003); doi: 10.1117/12.530761; https://doi.org/10.1117/12.530761
PROCEEDINGS
9 PAGES


SHARE
KEYWORDS
Polymethylmethacrylate

Foam

Nickel

Optical microcavities

Process modeling

Microfluidics

Polymers

Back to Top