30 December 2003 Fabrication of integrated inductors on silicon for fully integrated DC-DC microconverters
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Proceedings Volume 5342, Micromachining and Microfabrication Process Technology IX; (2003) https://doi.org/10.1117/12.531969
Event: Micromachining and Microfabrication, 2004, San Jose, California, United States
The market of portable instruments is growing more and more. For applications such as computers, cellular phones and microsystems, it is essential to reduce size and weight of electronic devices, including power unit supplies associated with these products. This evolution will require high efficiency on-chip DC-DC converters providing low voltage for the various Ics. Therefore, fabrication of magnetic components dedicated to power conversion becomes necessary. To miniaturize inductors, the micromachining techniques provide solutions based on low-temperature process compatible with active part of the converter. In this paper, a "spiral type" inductor topology designed for power electronics application is investigated. Thick resist molds photolithography and electroplating techniques are used to achieve the copper conductor and the NiFe laminated magnetic core.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ghislain Troussier, Ghislain Troussier, Jean-Pierre Laur, Jean-Pierre Laur, Jean-Louis Sanchez, Jean-Louis Sanchez, David Bourrier, David Bourrier, Veronique Conedera, Veronique Conedera, Monique Dilhan, Monique Dilhan, Norbert Fabre, Norbert Fabre, Yves Lembeye, Yves Lembeye, Herve Morel, Herve Morel, Bruno Cogitore, Bruno Cogitore, } "Fabrication of integrated inductors on silicon for fully integrated DC-DC microconverters", Proc. SPIE 5342, Micromachining and Microfabrication Process Technology IX, (30 December 2003); doi: 10.1117/12.531969; https://doi.org/10.1117/12.531969


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