Original technology applied for manufacturing a cantilever-type piezoresistive micro-accelerometer

Niculae N. Dumbravescu; Alin Enescu

doi:10.1117/12.530523

30 December 2003 Original technology applied for manufacturing a cantilever-type piezoresistive micro-accelerometer

Niculae N. Dumbravescu, Alin Enescu

Proceedings Volume 5342, Micromachining and Microfabrication Process Technology IX; (2003) https://doi.org/10.1117/12.530523
Event: Micromachining and Microfabrication, 2004, San Jose, California, United States

Abstract

An original new design for manufacturing a piezo-resistive type micro-accelerometer made by Si bulk micro-machining is proposed. The enhancements applied by the authors especially in design and also in processing and control techniques lead to a more precise device, having a superior reliability. Opposite to classical type, the new model have shorter cantilever, enabling to have an uniform stress and so permitting us a long piezo-resistor design. This in turn enables the use of low surface boron concentration of diffused resistors, resulting in a low temperature drift. After ANSIS simulation, showing the benefits of this new design, it follows the description of layout-based surface and volume control elements, and finally the processing enhancements applied to give a 1g piezo-resistive accelerometer

Citation Download Citation

Niculae N. Dumbravescu and Alin Enescu "Original technology applied for manufacturing a cantilever-type piezoresistive micro-accelerometer", Proc. SPIE 5342, Micromachining and Microfabrication Process Technology IX, (30 December 2003); https://doi.org/10.1117/12.530523

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