30 December 2003 Process design environment for microfabrication technologies
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Proceedings Volume 5342, Micromachining and Microfabrication Process Technology IX; (2003) https://doi.org/10.1117/12.524368
Event: Micromachining and Microfabrication, 2004, San Jose, California, United States
Abstract
Microfabrication technologies require adequate design methodologies since there is a strong interaction between the shape or the layout of microstructures and their fabrication process sequence. Both areas are subject of design. This paper gives an overview over the different design methodologies in design of microstructures focusing on fabrication process design. To derive the novel design models, the different approaches in digital, analog, mixed-signal, and MEMS design are described. The second part of the paper addresses the state of the art in process flow design tools. Eventually a new software environment based on the design models is presented that is based on current software technologies and platform independent programming
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Andreas Wagener, Jens Popp, Kai Hahn, "Process design environment for microfabrication technologies", Proc. SPIE 5342, Micromachining and Microfabrication Process Technology IX, (30 December 2003); doi: 10.1117/12.524368; https://doi.org/10.1117/12.524368
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