23 December 2003 Multifunctional interferometric platform for on-chip testing of the micromechanical properties of MEMS/MOEMS
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Proceedings Volume 5343, Reliability, Testing, and Characterization of MEMS/MOEMS III; (2003) https://doi.org/10.1117/12.524324
Event: Micromachining and Microfabrication, 2004, San Jose, California, United States
Abstract
We have developed a multifunctional interferometric platform for testing MEMS/MOEMS, measuring the 3-D out-of-plane deflections and providing both material properties and motion behaviour of microdevices. Specific metrology procedures have been demonstrated to determine respectively and residual stress of silicon membranes compressively prestressed by SiOxNy PECVD deposition study of vibration modes of PZT microactuators as well as the expertise of Scratch Drive Actuators.
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Christophe Gorecki, Michal Jozwik, Leszek A. Salbut, "Multifunctional interferometric platform for on-chip testing of the micromechanical properties of MEMS/MOEMS", Proc. SPIE 5343, Reliability, Testing, and Characterization of MEMS/MOEMS III, (23 December 2003); doi: 10.1117/12.524324; https://doi.org/10.1117/12.524324
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