23 December 2003 Planar distortion quantification to evaluate PDMS stamps affixed on glass support
Author Affiliations +
Proceedings Volume 5343, Reliability, Testing, and Characterization of MEMS/MOEMS III; (2003) https://doi.org/10.1117/12.523899
Event: Micromachining and Microfabrication, 2004, San Jose, California, United States
This article describes a planar distortion quantification method for PDMS stamps used in soft lithography by introducing an angular parameter θ; the distortion θ is proportional to planar distortion in magnitude. We employ this method to evaluate PDMS stamps planar distortions supported on different treated glass with Micron XYZ Scope measurements. The average planar distortion of individual pattern (absolute distortion θ1) and their pattern-to-pattern distortion (relative distortion θ2) of PDMS stamps were determined by angular discrepancies (θ). The planar distortion quantification was evaluated among four different PDMS stamps affixation treatments, and the PDMS stamps supported on silane-modified glass showed strong binding and minimal planar distortion, its absolute angular distortion θ1 was 3.98x10-3 and relative angular distortion θ2 1.22x10-3. Such distortion quantification agreed with the results of linear and area shrinkages on the stamps surface patterns, the results showed high reliability and fidelity of PDMS stamps and similar elastomer micro-patterns supported on silane-modified glass by photo lithographic microfabrication method and their promising prospects for on-chip synthesis of DNA microarray and bio-devices fabrication in soft lithography. The distortion evaluations demonstrate a versatile method for quantifying and comparing planar distortions among patterns as well as screening elastomer stamps support in soft lithography.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Quanguo He, Quanguo He, Zhengchun Liu, Zhengchun Liu, Jianxin Tang , Jianxin Tang , Libo Nie, Libo Nie, Hong Xiang, Hong Xiang, Hong Chen, Hong Chen, Pengfeng Xiao, Pengfeng Xiao, Nongyue He, Nongyue He, } "Planar distortion quantification to evaluate PDMS stamps affixed on glass support", Proc. SPIE 5343, Reliability, Testing, and Characterization of MEMS/MOEMS III, (23 December 2003); doi: 10.1117/12.523899; https://doi.org/10.1117/12.523899

Back to Top