Analysis of the influence of electrode gap on parameters of optical microscanners

Nikolay Ivanovich Mukhurov; Georgiy Ignat'evich Efremov

doi:10.1117/12.527362

24 January 2004 Analysis of the influence of electrode gap on parameters of optical microscanners

Nikolay Ivanovich Mukhurov, Georgiy Ignat'evich Efremov

Proceedings Volume 5344, MEMS/MOEMS Components and Their Applications; (2004) https://doi.org/10.1117/12.527362
Event: Micromachining and Microfabrication, 2004, San Jose, California, United States

Abstract

Two design versions are proposed for optical microscanners: the first one - with two steps of the stationary electrode symmetrically arranged on the base relative to the symmetry axis, and the second one - with one step. Both schemes make use of a Push-Pull system, i.e. attraction and repulsion moments are taken into account, which make it possible to obtain basic curve on the relative scale. In the symmetrical scheme, compensation of electrostatic forces is achieved by increasing of the inter-electrode distance under the anchor ends. The optimal value of the working rotation angle of the mirror α_T=0.95α_max has been obtained for m₀=0.2; m₁=0.9; m₂=0.46. The one-sided scheme uses a repulsion moment value at small rotation angles. It also ensures a controlled rotation of the anchor in the range α_T/α_max=0.95 with the electrode gap-to-electrode distance ratios of t₁=0.2t; t₂=2t. It should be noted that zones of smooth transition on the curves are excluded, which results in considerably increased beam addressing accuracy. Also, a relatively small (1.5…2-fold) increase in the operating voltage is worth noting. Thus, changing of the geometry of the electrode gap can be one of the effective ways towards optimization of optical microscanner parameters.

Citation Download Citation

Nikolay Ivanovich Mukhurov and Georgiy Ignat'evich Efremov "Analysis of the influence of electrode gap on parameters of optical microscanners", Proc. SPIE 5344, MEMS/MOEMS Components and Their Applications, (24 January 2004); https://doi.org/10.1117/12.527362

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available