24 January 2004 Analysis of the influence of electrode gap on parameters of optical microscanners
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Proceedings Volume 5344, MEMS/MOEMS Components and Their Applications; (2004) https://doi.org/10.1117/12.527362
Event: Micromachining and Microfabrication, 2004, San Jose, California, United States
Two design versions are proposed for optical microscanners: the first one - with two steps of the stationary electrode symmetrically arranged on the base relative to the symmetry axis, and the second one - with one step. Both schemes make use of a Push-Pull system, i.e. attraction and repulsion moments are taken into account, which make it possible to obtain basic curve on the relative scale. In the symmetrical scheme, compensation of electrostatic forces is achieved by increasing of the inter-electrode distance under the anchor ends. The optimal value of the working rotation angle of the mirror αT=0.95αmax has been obtained for m0=0.2; m1=0.9; m2=0.46. The one-sided scheme uses a repulsion moment value at small rotation angles. It also ensures a controlled rotation of the anchor in the range αTmax=0.95 with the electrode gap-to-electrode distance ratios of t1=0.2t; t2=2t. It should be noted that zones of smooth transition on the curves are excluded, which results in considerably increased beam addressing accuracy. Also, a relatively small (1.5…2-fold) increase in the operating voltage is worth noting. Thus, changing of the geometry of the electrode gap can be one of the effective ways towards optimization of optical microscanner parameters.
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Nikolay Ivanovich Mukhurov, Nikolay Ivanovich Mukhurov, Georgiy Ignat'evich Efremov, Georgiy Ignat'evich Efremov, } "Analysis of the influence of electrode gap on parameters of optical microscanners", Proc. SPIE 5344, MEMS/MOEMS Components and Their Applications, (24 January 2004); doi: 10.1117/12.527362; https://doi.org/10.1117/12.527362

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