24 January 2004 Confirmation of large-periphery compressible gas flow model for microvalves
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Proceedings Volume 5344, MEMS/MOEMS Components and Their Applications; (2004) https://doi.org/10.1117/12.532665
Event: Micromachining and Microfabrication, 2004, San Jose, California, United States
Abstract
Previously, a compressible gas flow model was proposed, which couples microvalve structural parameters to gas parameters and flow boundary conditions, and which explained the behavior of compressible flow over a large range of conditions. However, only a limited set of data, from a single orifice for the valve seat, was used to substantiate the model. Multiple-hole or large-periphery valve seat structures were not measured. In this work, the proposed comprehensive compressible gas flow model for microvalves is confirmed using measurements of flow through multi-hole valve seat structures in microvalves.
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Albert K. Henning, Albert K. Henning, } "Confirmation of large-periphery compressible gas flow model for microvalves", Proc. SPIE 5344, MEMS/MOEMS Components and Their Applications, (24 January 2004); doi: 10.1117/12.532665; https://doi.org/10.1117/12.532665
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