24 January 2004 Sensitivity of piezoresistive readout device for microfabricated acoustic spectrum analyzer
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Proceedings Volume 5344, MEMS/MOEMS Components and Their Applications; (2004) https://doi.org/10.1117/12.524628
Event: Micromachining and Microfabrication, 2004, San Jose, California, United States
Abstract
A readout mechanism has been developed for measuring the response of mechanical microresonators to be used in an array for a microfabricated acoustic spectrum analyzer. It is based on the piezo-resistive property of polysilicon. The piezo-resistive readout mechanism is constructed in a quarter Wheatstone bridge fashion in which four equal serpentine polysilicon patterns are fabricated on top of a dielectric layer of silicon nitride. Microresonator devices using cantilever and clamped-clamped beam types with piezo-resistive readout mechanisms are fabricated using the surface micromachining technology of SUMMiTTM. The sensitivity of the piezo-resistive mechanism is characterized using 10 volts as supply on the Wheatstone bridge and no amplification of signal. The testing is conducted with electrostatic drive potentials 0-75 volts. Sensitivity of 1-5 millivolts per micron of beam deflection was observed by the characterization.
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Harold L. Stalford, Christopher A. Apblett, Seethambal S. Mani, W. Kent Schubert, Mark W. Jenkins, "Sensitivity of piezoresistive readout device for microfabricated acoustic spectrum analyzer", Proc. SPIE 5344, MEMS/MOEMS Components and Their Applications, (24 January 2004); doi: 10.1117/12.524628; https://doi.org/10.1117/12.524628
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