24 January 2004 Sensitivity of piezoresistive readout device for microfabricated acoustic spectrum analyzer
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Proceedings Volume 5344, MEMS/MOEMS Components and Their Applications; (2004) https://doi.org/10.1117/12.524628
Event: Micromachining and Microfabrication, 2004, San Jose, California, United States
A readout mechanism has been developed for measuring the response of mechanical microresonators to be used in an array for a microfabricated acoustic spectrum analyzer. It is based on the piezo-resistive property of polysilicon. The piezo-resistive readout mechanism is constructed in a quarter Wheatstone bridge fashion in which four equal serpentine polysilicon patterns are fabricated on top of a dielectric layer of silicon nitride. Microresonator devices using cantilever and clamped-clamped beam types with piezo-resistive readout mechanisms are fabricated using the surface micromachining technology of SUMMiTTM. The sensitivity of the piezo-resistive mechanism is characterized using 10 volts as supply on the Wheatstone bridge and no amplification of signal. The testing is conducted with electrostatic drive potentials 0-75 volts. Sensitivity of 1-5 millivolts per micron of beam deflection was observed by the characterization.
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Harold L. Stalford, Harold L. Stalford, Christopher A. Apblett, Christopher A. Apblett, Seethambal S. Mani, Seethambal S. Mani, W. Kent Schubert, W. Kent Schubert, Mark W. Jenkins, Mark W. Jenkins, "Sensitivity of piezoresistive readout device for microfabricated acoustic spectrum analyzer", Proc. SPIE 5344, MEMS/MOEMS Components and Their Applications, (24 January 2004); doi: 10.1117/12.524628; https://doi.org/10.1117/12.524628

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