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23 December 2003 Laser processes for prototyping and production of novel microfluidic structures
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Proceedings Volume 5345, Microfluidics, BioMEMS, and Medical Microsystems II; (2003) https://doi.org/10.1117/12.524547
Event: Micromachining and Microfabrication, 2004, San Jose, California, United States
Abstract
We describe a number of microfluidic components that have been formed by laer micromachining and incorporated in a picoliter droplet dispenser. The laser micromachined structures include an adhesive interface between macrofluidic and microfluidic regions, a particle filter, a fluid manifold, channels, and nozzles. Both excimer laser and C02 laser processes are used.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
John R. Andrews and Bradley Gerner "Laser processes for prototyping and production of novel microfluidic structures", Proc. SPIE 5345, Microfluidics, BioMEMS, and Medical Microsystems II, (23 December 2003); https://doi.org/10.1117/12.524547
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