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24 January 2004 Low-voltage 256-electrode membrane mirror system for adaptive optics
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Proceedings Volume 5346, MOEMS and Miniaturized Systems IV; (2004)
Event: Micromachining and Microfabrication, 2004, San Jose, California, United States
Low stress membrane mirrors will allow improved wave front correction in vision science and astronomical adaptive optics systems. We have fabricated low stress membrane mirrors from single crystal silicon, and flip chip bonded membranes to electrode arrays. These devices operate at lower voltage and have greater stroke than existing membrane mirror devices; they have 256 control electrodes, and are driven by off chip electronics. Devices have a single electrode plane and are pre-biased to allow full wave front correction. We have demonstrated these devices in an adaptive optics system consisting of a coherent source, and a Shack-Hartmann wave front sensor. We compare the experimental performance of the devices to computer simulations and theoretical calculations.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Peter L. Kurczynski, Harold M. Dyson, Bernard Sadoulet, J. Eric Bower, Warren Y-C. Lai, William M. Mansfield, and J. Ashley Taylor "Low-voltage 256-electrode membrane mirror system for adaptive optics", Proc. SPIE 5346, MOEMS and Miniaturized Systems IV, (24 January 2004);

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