24 January 2004 MEMS tunable optical filter based on photonic crystal
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Proceedings Volume 5346, MOEMS and Miniaturized Systems IV; (2004) https://doi.org/10.1117/12.529237
Event: Micromachining and Microfabrication, 2004, San Jose, California, United States
Abstract
Photonic crystal with defects such as (L1H1)m LCH2(L2H2)n is investigated in this paper. The band gap edge transmission peak is narrowed when the couple-layer LC and the cover layer H2(L2H2)n are added to the photonic crystal (L1H1)m. Two different structures were studied in thip paper. Structure A is not suitable for the tunable filter, which has two discrete tuning regions. Structure B provides a good optical tuning method: large dynamic range (>150 nm), narrow bandwidth (FWHM is about 2 nm) and good tuning linearity. This kind of structure can be fabricated by the surface micromachined technique easily.
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Huibing Mao, Huibing Mao, "MEMS tunable optical filter based on photonic crystal", Proc. SPIE 5346, MOEMS and Miniaturized Systems IV, (24 January 2004); doi: 10.1117/12.529237; https://doi.org/10.1117/12.529237
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