Measurement of a laterally deformable optical MEMS grating transducer

Dustin W. Carr; Bianca E. N. Keeler; John P. Sullivan; Thomas A. Friedmann; Joel R. Wendt

doi:10.1117/12.532340

24 January 2004 Measurement of a laterally deformable optical MEMS grating transducer

Dustin W. Carr, Bianca E. N. Keeler, John P. Sullivan, Thomas A. Friedmann, Joel R. Wendt

Proceedings Volume 5346, MOEMS and Miniaturized Systems IV; (2004) https://doi.org/10.1117/12.532340
Event: Micromachining and Microfabrication, 2004, San Jose, California, United States

Abstract

We have experimentally demonstrated operation of a laterally deformable optical NEMS grating transducer. The device is fabricated in amorphous diamond on a silicon substrate with standard lithographic techniques. For small changes in the spacing of the grating elements, a large change in the optical reflection amplitude is observed. An in-plane motion detection sensitivity of 160 fm/√Hz has been measured, which agrees well with theoretical models. This sensitivity compares favorably to that of any other MEMS transducer. Calculations predict that this sensitivity could be improved by up to two orders of magnitude in future designs. As well as having applications to the field of accelerometers and other inertial sensors, this device could also be used as a modulator for optical switching.

Citation Download Citation

Dustin W. Carr, Bianca E. N. Keeler, John P. Sullivan, Thomas A. Friedmann, and Joel R. Wendt "Measurement of a laterally deformable optical MEMS grating transducer", Proc. SPIE 5346, MOEMS and Miniaturized Systems IV, (24 January 2004); https://doi.org/10.1117/12.532340

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