Microfabrication technologies for missile components

Tracy Dean Hudson; Paul R. Ashley; Mark G. Temmen; Michael S. Kranz; Milan Buncick; Eric Tuck; Deanna K. McMillen

doi:10.1117/12.532616

29 December 2003 Microfabrication technologies for missile components

Tracy Dean Hudson; Paul R. Ashley; Mark G. Temmen; Michael S. Kranz; Milan Buncick; Eric Tuck; Deanna K. McMillen

Author Affiliations +

Proceedings Volume 5347, Micromachining Technology for Micro-Optics and Nano-Optics II; (2003) https://doi.org/10.1117/12.532616
Event: Micromachining and Microfabrication, 2004, San Jose, California, United States

Abstract

This invited communication presents the microfabrication technologies, and associated issues, being developed by the U.S. Army’s AMRDEC for missile components. Primary components are inertial sensors and radio frequency switches. Two inertial sensor types are discussed -- fiber optic and micro-electromechanical system (MEMS) gyroscopes. The RF switches are also based on MEMS technology and are a natural extension of the microfabrication processes developed for the MEMS gyroscope.

Citation Download Citation

Tracy Dean Hudson, Paul R. Ashley, Mark G. Temmen, Michael S. Kranz, Milan Buncick, Eric Tuck, Deanna K. McMillen, "Microfabrication technologies for missile components", Proc. SPIE 5347, Micromachining Technology for Micro-Optics and Nano-Optics II, (29 December 2003); doi: 10.1117/12.532616; https://doi.org/10.1117/12.532616

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