Thick microlens array fabricated by soft lithography in hybrid sol-gel glass

XiaoCong Yuan; Weixing Yu; Vladimir Kudryashov; Ken-Jin Moh; Nam Quoc Ngo

doi:10.1117/12.524204

29 December 2003 Thick microlens array fabricated by soft lithography in hybrid sol-gel glass

XiaoCong Yuan, Weixing Yu, Vladimir Kudryashov, Ken-Jin Moh, Nam Quoc Ngo

Proceedings Volume 5347, Micromachining Technology for Micro-Optics and Nano-Optics II; (2003) https://doi.org/10.1117/12.524204
Event: Micromachining and Microfabrication, 2004, San Jose, California, United States

Abstract

This paper describes a cost-effective and high-volume soft-lithography method for building microlenses in hybrid sol-gel glass. The fabrication processes comprise the following three steps, namely fabricating microlens array in photoresist as a master lenses, molding replication of the lenses in poly-dimethylsiloxane (PDMS) as elastometric molds and embossing to press the PDMS replica onto the hybrid sol-gel glass. During the embossing process, while the PDMS mold is applied, the sol-gel sample was cured by UV exposure for densification. In this work, the master microlenses were patterned in photoresist using the reflow technique, where the authors took full advantage of the matured photosensitive material and fabrication technologies as the first and transitional step. This method enables us to fabricate thick micro-optical elements in sol-gel glass and it will be suitable for a range of applications in free-space and guided wave optics.

Citation Download Citation

XiaoCong Yuan, Weixing Yu, Vladimir Kudryashov, Ken-Jin Moh, and Nam Quoc Ngo "Thick microlens array fabricated by soft lithography in hybrid sol-gel glass", Proc. SPIE 5347, Micromachining Technology for Micro-Optics and Nano-Optics II, (29 December 2003); https://doi.org/10.1117/12.524204

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available