A micromachined thermo-optical light modulator based on the VO<sub>2</sub> phase transition

Lijun Jiang; William N. Carr

doi:10.1117/12.524239

24 January 2004 A micromachined thermo-optical light modulator based on the VO₂ phase transition

Lijun Jiang, William N. Carr

Proceedings Volume 5348, MOEMS Display and Imaging Systems II; (2004) https://doi.org/10.1117/12.524239
Event: Micromachining and Microfabrication, 2004, San Jose, California, United States

Abstract

Vanadium dioxide (VO₂) thin film undergoes a semiconductor-to-metal phase transition at about 68°C, which is accompanied with abrupt changes in its optical properties. A light modulator array has been developed by surface micromachining based on this thermally induced optical switching. The good thermal isolation and the small thermal mass of the micromachined pixels prevent thermal cross talk and provide advantages of low power consumption as well as high switching speed. The VO₂ pixel design was optimized by thermal and optical simulations. Active VO₂ thin film was fabricated by evaporation of vanadium film followed by thermal oxidation. The light modulator array has been realized in 64 × 64 format by surface micromachining using polyimide sacrificial layer. Preliminary characterization and testing result will be presented.

Citation Download Citation

Lijun Jiang and William N. Carr "A micromachined thermo-optical light modulator based on the VO₂ phase transition", Proc. SPIE 5348, MOEMS Display and Imaging Systems II, (24 January 2004); https://doi.org/10.1117/12.524239

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