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24 January 2004 A micromachined thermo-optical light modulator based on the VO2 phase transition
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Proceedings Volume 5348, MOEMS Display and Imaging Systems II; (2004) https://doi.org/10.1117/12.524239
Event: Micromachining and Microfabrication, 2004, San Jose, California, United States
Abstract
Vanadium dioxide (VO2) thin film undergoes a semiconductor-to-metal phase transition at about 68°C, which is accompanied with abrupt changes in its optical properties. A light modulator array has been developed by surface micromachining based on this thermally induced optical switching. The good thermal isolation and the small thermal mass of the micromachined pixels prevent thermal cross talk and provide advantages of low power consumption as well as high switching speed. The VO2 pixel design was optimized by thermal and optical simulations. Active VO2 thin film was fabricated by evaporation of vanadium film followed by thermal oxidation. The light modulator array has been realized in 64 × 64 format by surface micromachining using polyimide sacrificial layer. Preliminary characterization and testing result will be presented.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Lijun Jiang and William N. Carr "A micromachined thermo-optical light modulator based on the VO2 phase transition", Proc. SPIE 5348, MOEMS Display and Imaging Systems II, (24 January 2004); https://doi.org/10.1117/12.524239
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