24 January 2004 Deformable diffraction grating for scanning microinterferometer arrays
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Proceedings Volume 5348, MOEMS Display and Imaging Systems II; (2004) https://doi.org/10.1117/12.527458
Event: Micromachining and Microfabrication, 2004, San Jose, California, United States
Abstract
A micro grating interferometer has been fabricated to use in measuring the dynamic performance of MEMS devices. The system uses a phase sensitive diffraction grating for interferometric axial resolution and a microfabricated lens for improved lateral response. Early experimental results using a non-deformable grating interferometer show that both the transient and steady state vibration of MEMS devices can be measured and mapped using the micro interferometer. These initial results also reveal vibrational noise and sample alignment problems. To avoid these obstacles and to maximize the sensitivity of the interferometer, a PID control unit is introduced. Analysis has been performed on the interferometer system to improve the controller design. A deformable grating interferometer has also been fabricated using microfabrication techniques and tested to show proper range of actuation under DC bias. This grating also demonstrates the ability to maintain a high sensitivity during operation.
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Byungki Kim, Byungki Kim, Michael C. Schmittdiel, Michael C. Schmittdiel, F. Levent Degertekin, F. Levent Degertekin, Thomas R. Kurfess, Thomas R. Kurfess, } "Deformable diffraction grating for scanning microinterferometer arrays", Proc. SPIE 5348, MOEMS Display and Imaging Systems II, (24 January 2004); doi: 10.1117/12.527458; https://doi.org/10.1117/12.527458
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