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24 January 2004 Electrostatic actuated optical Fabry-Perot switches in passive matrix displays
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Proceedings Volume 5348, MOEMS Display and Imaging Systems II; (2004) https://doi.org/10.1117/12.523344
Event: Micromachining and Microfabrication, 2004, San Jose, California, United States
Abstract
In this paper a new approach for the realisation of a passive matrix image projection display consisting of electrostatic actuated Fabry-Perot filters for digital wavelength switching is presented. The switches either may be working by illumination with polychromatic or with monochromatic light, e.g. by a laser. In the first case the output light has to be filtered at the desired wavelength. In order to define the interferometric properties of the dielectric layers and thus the switching wavelength optical parameters like thickness and refractive index have to be adjusted carefully. The display switches can be adapted either to reflection or transmission mode, depending on whether silicon or quartz is used as substrate material. Especially hexagonal shaped pixel membranes for working either in reflection at a wavelength of 536 nm or in transmission for 500 nm are described. The assembly is arranged matrix-like in rows and columns, where at each intersection point a pixel is located. The switching of a pixel into the 'on'-state is achieved by applying a voltage on the corresponding row and column contact lines of the display. The resulting intersection potential deflects the addressed pixel membrane whereas adjacent pixels are nearly not affected. Actual measurements allow high switching frequencies of about 2 kHz at voltages in the range of 2 - 60 V, depending on the pixel design. The switching contrast maximum is aobut 80%, the contrast beteeen addressed and non-addressed adjacent pixels is 75%.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Thomas Knieling, Meik Panitz, and Wolfgang Benecke "Electrostatic actuated optical Fabry-Perot switches in passive matrix displays", Proc. SPIE 5348, MOEMS Display and Imaging Systems II, (24 January 2004); https://doi.org/10.1117/12.523344
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