24 January 2004 MEMS microscanning mirror for barcode reading: from development to production
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Proceedings Volume 5348, MOEMS Display and Imaging Systems II; (2004); doi: 10.1117/12.530795
Event: Micromachining and Microfabrication, 2004, San Jose, California, United States
Abstract
The micro scanning mirror with lateral out-of-plane comb drives is on its way to volume fabrication. This article reviews the development and highlights the most important activities and decisions that are representative for many MEMS devices that are supposed to go the same way. Careful analysis of the product requirements, design for reliability, design for testability, design for packaging, a mature process, and automated testing preferably on wafer-level have been identified as keys to volume fabrication of MEMS.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Alexander Wolter, Harald Schenk, Eric Gaumont, Hubert Lakner, "MEMS microscanning mirror for barcode reading: from development to production", Proc. SPIE 5348, MOEMS Display and Imaging Systems II, (24 January 2004); doi: 10.1117/12.530795; https://doi.org/10.1117/12.530795
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KEYWORDS
Mirrors

Microelectromechanical systems

Micromirrors

Reliability

Packaging

Etching

Oxides

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