24 January 2004 Silicon micro-optics for smart light control
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Proceedings Volume 5348, MOEMS Display and Imaging Systems II; (2004) https://doi.org/10.1117/12.532482
Event: Micromachining and Microfabrication, 2004, San Jose, California, United States
Abstract
We present an overview of the results of our recent research in the field of adaptive optical components based on silicon microtechnologies, including membrane deformable mirrors, spatial light modulators, liquid-crystal correctors, wavefront sensors, and both spherical and aspherical micro-optical components. We aim at the realization of adaptive optical systems using standard-technology solutions.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Gleb Vdovin, Gleb Vdovin, Davies W. de Lima Monteiro, Davies W. de Lima Monteiro, Ourang Akhzar-Mehr, Ourang Akhzar-Mehr, Mikhail Y. Loktev, Mikhail Y. Loktev, Serhat Sakarya, Serhat Sakarya, Oleg Soloviev, Oleg Soloviev, Pasqualina M. Sarro, Pasqualina M. Sarro, } "Silicon micro-optics for smart light control", Proc. SPIE 5348, MOEMS Display and Imaging Systems II, (24 January 2004); doi: 10.1117/12.532482; https://doi.org/10.1117/12.532482
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