18 June 2004 Multi-layered grating diffraction graphical user interfaced simulation toolbox in the MATLAB environment
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Abstract
Theoretical work of our group is placed in the general frame of efforts to improve numerical performance and efficiency of rigorous coupled-wave analysis of grating diffraction. Mathematical transformation of Maxwell equations for a multi-layered structure to evolution equations in functional space is presented. By-construction numerically stable symbolic algorithm to solve these equations using the notion of in-layer scattering operator is proposed. On the base of this algorithm a toolbox for simulation of diffraction from multi-layered grating structures, implemented by a graphical user interface is developed. An example of simulation using this in-house software is exposed.
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Mark Auslender, Mark Auslender, Avi Bergel, Avi Bergel, Nathan Pinhas, Nathan Pinhas, Shlomo Hava, Shlomo Hava, } "Multi-layered grating diffraction graphical user interfaced simulation toolbox in the MATLAB environment", Proc. SPIE 5349, Physics and Simulation of Optoelectronic Devices XII, (18 June 2004); doi: 10.1117/12.543636; https://doi.org/10.1117/12.543636
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