Measurement of organic/polymer material by phase modulation ellipsometry

Yong Ji; Eric Teboul; Alan Richard Kramer

doi:10.1117/12.529365

18 June 2004 Measurement of organic/polymer material by phase modulation ellipsometry

Yong Ji, Eric Teboul, Alan Richard Kramer

Proceedings Volume 5351, Organic Photonic Materials and Devices VI; (2004) https://doi.org/10.1117/12.529365
Event: Integrated Optoelectronic Devices 2004, 2004, San Jose, CA, United States

Abstract

Due to they can be tailored to provide a wide range of physical properties and their easiness of processing and fabrication, polymeric materials have found widespread use in the manufacture of microwave, electronics, photonics and bio-tech systems. This paper presents the basic principle of phase modulation spectroscopic ellipsometer (PMSE) and its advantages over other ellipsometry in measuring polymer film. Used for thin film measurements ultra-thin dielectric, meal film and organic film, the PMSE technique is now used over a wide spectral range from the vacuum ultraviolet to the mid infrared. Film thickness ranging from Angstrom up to 50um can be measured by PMSE. Applications of PMSE on measurement and characterization of polymer/organic material are given in the paper.

Citation Download Citation

Yong Ji, Eric Teboul, and Alan Richard Kramer "Measurement of organic/polymer material by phase modulation ellipsometry", Proc. SPIE 5351, Organic Photonic Materials and Devices VI, (18 June 2004); https://doi.org/10.1117/12.529365

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