8 June 2004 Quantum grid infrared photodetector arrays for use as a multichannel long wavelength spectrometer
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Proceedings Volume 5353, Semiconductor Photodetectors; (2004); doi: 10.1117/12.528945
Event: Integrated Optoelectronic Devices 2004, 2004, San Jose, CA, United States
Abstract
We report on the fabrication of quantum grid infrared photodetector (QGIP) arrays and demonstrate their feasibility for use as multi-channel long wavelength infrared spectrometers. The quantum well infrared photodetector (QWIP) material structure was designed to exhibit broadband absorption in the wavelength range of 7 μm to 16 μm. By fabricating QGIP devices with this QWIP material, scattering of light at an individual wavelength of interest within the material absorption range can create narrow band detection in each device. Arrays of QGIP devices with varying geometry, each tailored to respond to a discrete wavelength were fabricated. Details of the epi-growth, processing steps taken to fabricate required device features for narrow band absorption of the QGIP devices, and characterization methods will be discussed.
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Gerard Dang, Kwong-Kit Choi, John Little, "Quantum grid infrared photodetector arrays for use as a multichannel long wavelength spectrometer", Proc. SPIE 5353, Semiconductor Photodetectors, (8 June 2004); doi: 10.1117/12.528945; http://dx.doi.org/10.1117/12.528945
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KEYWORDS
Absorption

Quantum well infrared photodetectors

Sensors

Spectroscopy

Infrared radiation

Metals

Light scattering

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