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28 May 2004 Tightly confining AlGaAs waveguides and microcavities for optical frequency conversion
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We present the design and fabrication process for an AlGaAs optical frequency conversion device based on tightly confining waveguides and a Photonic Bandgap Crystal Microcavity. We first theoretically analyze the improvement in non-linear conversion efficiency due to a high confinement cavity, compared to traditional QPM waveguides. The theoretical analysis is supported by finite difference frequency and time domain simulations. The theoretical conversion efficiency estimated with these tools is ~4%/mW for a device ~10 μm long. Influence of sidewall roughness on the Q of the cavity is also analyzed. Then, we describe the fabrication process of our device, which involves molecular beam epitaxy, electron beam lithography and plasma etching.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Luigi Scaccabarozzi, Zheng Wang, Xiaojun Yu, Wah Tung Lau, Mehemet Fatih Yanik, Shanhui Fan, Martin M. Fejer, and James S. Harris Jr. "Tightly confining AlGaAs waveguides and microcavities for optical frequency conversion", Proc. SPIE 5355, Integrated Optics: Devices, Materials, and Technologies VIII, (28 May 2004);

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