Paper
28 May 2004 Waveguide sidewall roughness estimation via shape-from-shading surface reconstruction of SEM pictures
Alexis G. Bony, Andre Heid, Yoshitate Takakura, Klaus Satzke, Patrick Meyrueis
Author Affiliations +
Abstract
A shape-from-shading algorithm is applied to topography images of silica waveguide sidewalls coming from a Scanning Electron Microscope. The approach is found appropriate to restitute the sidewall profile. The reconstructed relief obtained is then height calibrated via Line Edge Roughness measurement. The technique enables thereafter roughness measurement at arbitrary positions on the sidewall, with the advantage of providing non-destructive testing on full wafer.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Alexis G. Bony, Andre Heid, Yoshitate Takakura, Klaus Satzke, and Patrick Meyrueis "Waveguide sidewall roughness estimation via shape-from-shading surface reconstruction of SEM pictures", Proc. SPIE 5355, Integrated Optics: Devices, Materials, and Technologies VIII, (28 May 2004); https://doi.org/10.1117/12.525049
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Scanning electron microscopy

Waveguides

Image filtering

Reconstruction algorithms

Line edge roughness

Silica

Calibration

Back to Top