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10 June 2004 Hybrid integration of optical modules for planar deflector switches
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Abstract
Nonblocking crossconnect photonic switches based on light beam deflection require planar optical modules with hybrid integration of active deflector chips. In this work we present optical modules with two dimensional silica microlens arrays and slab waveguides fabricated on silicon substrates. The 1.55 μm light is launched in the input microlens array, which collimates parallel beams propagating along the module. The slab waveguide vertically confines the light. The output microlenses focus the beams laterally into output fibers. Two chips are inserted in the light path after the input microlens and before the output microlens arrays. The input and output microlenses allow propagation of the light beams through modules up to 100 mm long with a beam width of less than 400 μm. A hybrid integration process flow is developed to place the deflector chips in the light path with high alignment accuracy. The chips are flip-chip bonded to the substrate with submicron accuracy in the vertical positioning. Various contributions can lead to the chip displacements such as, for example, standoff island height variations, aligner tolerances, substrate bow, etc. Experiments are conducted to evaluate the effect of chip displacement on the insertion losses of the hybrid-integrated modules. 100-mm long optical modules with input and output chips are fabricated with less than 4 dB insertion losses. The analysis of loss contributions and possibilities for improvements are discussed.
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Alexei L. Glebov, Michael Peters, James Roman, David Kudzuma, Kuo-Chuan Liu, Michael Lee, and Kishio Yokouchi "Hybrid integration of optical modules for planar deflector switches", Proc. SPIE 5358, Photonics Packaging and Integration IV, (10 June 2004); https://doi.org/10.1117/12.524931
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