Silanized polymeric working stamps for hot embossing lithography

Matthias Wissen; N. Bogdanski; R. Jerzy; Z. E. Berrada; Marion Fink; Freimut Reuther; Thomas Glinsner; Hella-Christin Scheer

doi:10.1117/12.532733

20 May 2004 Silanized polymeric working stamps for hot embossing lithography

Matthias Wissen, N. Bogdanski, R. Jerzy, Z. E. Berrada, Marion Fink, Freimut Reuther, Thomas Glinsner, Hella-Christin Scheer

Author Affiliations +

Proceedings Volume 5374, Emerging Lithographic Technologies VIII; (2004) https://doi.org/10.1117/12.532733
Event: Microlithography 2004, 2004, Santa Clara, California, United States

Abstract

Pattern replication into curable imprint resists by hot embossing offers the opportunity to use the replication after crosslinking as a working-stamp. The replications of a 4” Si stamp into the thermoset imprint polymer mr-I 9000R-XP with a commercial hot embossing system (EVGroup) have been coated with an anti-adhesive layer (trichlorosilane) from the gas-phase at ambient pressure. The investigation of the quality and durability of these anti-adhesive coatings reveals that the contact angles and the replication performance of the working-stamps were independent from the fact whether the polymer was already cured or still thermoplastic during the anti-adhesive coating. The prepared 4” working-stamps themselves have been successfully replicated into a low glass transition temperature resist (mr-L 6000.5 XP) and into PMMA.

Citation Download Citation

Matthias Wissen, N. Bogdanski, R. Jerzy, Z. E. Berrada, Marion Fink, Freimut Reuther, Thomas Glinsner, and Hella-Christin Scheer "Silanized polymeric working stamps for hot embossing lithography", Proc. SPIE 5374, Emerging Lithographic Technologies VIII, (20 May 2004); https://doi.org/10.1117/12.532733

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