Author Affiliations +
Jackie Yu,1 Anita Viswanathan,2 Mokoto Miyagi,2 Junichi Uchida,1 Lawrence Lane,1 Kelly A. Barry,1 Machi Kajitani,3 Toshihiko Kikuchi,3 K. C. Chan,4 Fred E. Stanke4
1Timbre Technologies, Inc. (United States)
2Tokyo Electron America, Inc. (United States)
3Tokyo Electron, Ltd. (Japan)
4ThermaWave, Inc. (United States)